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Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma
Authors:Sorin D Anghel  Tiberiu Frentiu  Eugen Darvasi  Ana-Maria Rusu  Alpar Simon and E A Cordos
Institution:(1) Chemistry Department and Research Center for Analytical Instrumentation, University of Cluj, PO Box 717, Of. P.5, 3400 Cluj-Napoca, Romania;(2) Physics Department, University of Cluj, 3400 Cluj-Napoca, Romania
Abstract:The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.
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