Fabrication of surface-patterned ZnO thin films using sol–gel methods and nanoimprint lithography |
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Authors: | Shuxi Dai Yang Wang Dianbo Zhang Xiao Han Qing Shi Shujie Wang Zuliang Du |
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Institution: | (1) Key Laboratory for Special Functional Materials of Ministry of Education, Henan University, Kaifeng, 475004, People’s Republic of China; |
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Abstract: | Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based
ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films
during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the
patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to
an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered
templates using this combination of sol–gel and nanoimprint lithography techniques. |
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