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Phase transition properties of vanadium oxide films deposited by polymer-assisted deposition
Authors:Fang Yue  Wanxia Huang  Qiwu Shi  Danxia Li  Yanyan Hu  Yang Xiao  Xianjing Deng  Cheng Wang
Institution:1. College of Materials Science and Engineering, Sichuan University, Chengdu, 610064, Sichuan, People’s Republic of China
2. College of Physical Science and Technology, Sichuan University, Chengdu, 610064, Sichuan, People’s Republic of China
3. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, 621900, People’s Republic of China
Abstract:Vanadium dioxide (VO2) films were synthesized on mica substrates by a polymer-assisted deposition method, followed by rapid annealing with different annealing temperatures. The crystalline structure and morphology of the films were investigated by XRD and FE-SEM, and their phase transition properties were studied by in situ FT-IR. The results indicated that the annealing temperature affected the crystalline structure and morphology of the films remarkably, which then resulted in varied phase transition properties. In particular, the films annealed at higher temperature showed more polycrystalline structure, increased particle size and reduced phase transition intensity. But the films exhibited the similar hysteresis temperature width with increasing annealing temperature.
Keywords:
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