电子能量对沿面介质阻挡放电等离子体化学产物的影响

基于光电倍增管研制了一套无触发信号的双通道光学探测系统, 并组装了测试样机, 实现了对沿面介质阻挡放电(SDBD)等离子体约化电场的测量, 进而通过BOLSIG+软件获得了电子能量. 采用原位紫外吸收光谱和傅里叶变换红外光谱, 研究了SDBD等离子体在不同电压和频率下的化学产物的浓度变化, 并结合空气等离子体化学反应揭示了产物相互作用的微观机理. 结果表明, 电子能量能够改变电子碰撞反应的速率系数, 调控化学反应的源头活性粒子的浓度, 进而影响到化学产物的生成和猝灭.

Effects of Electron Energy on the Chemical Products of Surface Dielectric Barrier Discharge Plasma

A dual-channel optical detection system without trigger signal was developed based on photomultiplier tube， and a test prototype was established to accomplish the measurement of the approximate electric field of surface dielectric barrier discharge（SDBD） plasma， thus allowing the determination of the electron energy by the BOLSIG+ software. In addition， the changes of chemical products in SDBD plasma at different voltages and frequencies were researched by in?situ UV absorption spectrum and Fourier transform infrared spectrum. On this basis， the micro? scopic mechanism of product interaction was analyzed in conjunction with the plasma chemical reactions. The results indicated that the electron energy could change the rate coefficient of electron collision reactions and regulate the concentration of reactive particles which are the source of chemical reactions， thus affecting the generation and quenching of chemical products. Therefore， the present study contributes to a better understanding of the physico-chemical processes in low-temperature plasmas and provides a referable scientific and theoretical basis for the regulation of plasma products applications.