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添加氧影响下低压金刚石生长的条件
引用本文:刘志杰,万永中,张卫,张剑云,王季陶.添加氧影响下低压金刚石生长的条件[J].高等学校化学学报,1998,19(7):1140-1143.
作者姓名:刘志杰  万永中  张卫  张剑云  王季陶
作者单位:复旦大学电子工程系, 上海, 200433
基金项目:国家自然科学基金,“八六三”高科技基金
摘    要:采用非平衡热力学耦合模型研究金刚石在CO-H2、CO-O2-H2体系中的生长情况,计算不同氧含量下的金刚石生长相图,固定氧氢比考察压力变化对金刚石生长区的影响,讨论了不同氧氢含量对金刚石生长区的影响。与经典的平衡热力学理论计算所得的相图不同,本文的相图均有金刚石生长区,可以很好地解释低压下金刚石在气相中的生长,还可以用于指导低压金刚石生长的实验研究。

关 键 词:非平衡热力学  相图  金刚石  
收稿时间:1997-05-19

Diamond Growth Condition at Low-Pressure Influenced by Addition of Oxygen
LIU Zhi-Jie,WAN Yong-Zhong,ZHANG Wei,ZHANG Jian-Yun,WANG Ji-Tao.Diamond Growth Condition at Low-Pressure Influenced by Addition of Oxygen[J].Chemical Research In Chinese Universities,1998,19(7):1140-1143.
Authors:LIU Zhi-Jie  WAN Yong-Zhong  ZHANG Wei  ZHANG Jian-Yun  WANG Ji-Tao
Institution:Department of Electronic Engineering, Fudan University, Shanghai, 200433
Abstract:Diamond growth using CO H 2 and CO O 2 H 2 as input gases was studied based on the non equilibrium thermodynamic coupling model. The phase diagrams of diamond growth with different content of oxygen in the reaction system were calculated. The diagrams have diamond growth regions, which were different from the diagrams based on classical equilibrium thermodynamics. Also, the diamond growth regions at different system pressures and different contents of oxygen were discussed in this paper. These results can guide the experimental study on diamond growth at low pressure because the theoretical phase diagrams coordinate very well with the experimental results which had been published.
Keywords:Non equilibrium thermodynamics  Phase diagram  Diamond  
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