Zur Reaktion von CF4, CBrF3 und CBr2F2 mit Kieselglas

Reaction of CF₄, CBrF₃, and CBr₂F₂ with Silica CF₄ reacts with silica above 1200 K forming SiF₄ and CO₂. CBrF₃ and CBr₂F₂ yield SiF₄, Br₂, CO₂, and CO as well as products of pyrolysis, such as C₂BrF₅, C₂Br₂F₄, and others. The reaction starts at 900 K (CBrF₃) or 700 K (CBr₂F₂), resp. The CO₂/CO ratio is higher than expected. SiF₄ is absorbed at the surface of silica to a considerable extent.