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Electrochemical Deposition onto Self‐Assembled Monolayers: New Insights into Micro‐ and Nanofabrication
Abstract:Pattern transfer with high resolution is a frontier topic in the emerging field of nanotechnologies. Electrochemical molding is a possible route for nanopatterning metal, alloys and oxide surfaces with high resolution in a simple and inexpensive way. This method involves electrodeposition onto a conducting master covered by a self‐assembled alkanethiolate monolayer (SAMs). This molecular film enables direct surface–relief pattern transfer from the conducting master to the inner face of the electrodeposit, and also allows an easy release of the electrodeposited film due their excellent anti‐adherent properties. Replicas of the original conductive master can be also obtained by a simple two‐step procedure. SAM quality and stability under electrodeposition conditions combined with the formation of smooth electrodeposits are crucial to obtain high‐quality pattern transfer with sub‐50 nm resolution.
Keywords:alloys  electrochemistry  metal  nanotechnology  oxides  self‐assembled monolayers
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