Nanopatterning of Si(1 1 1) surfaces by atomic force microscope scratching of an organic monolayer |
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| Institution: | 1. Department of Materials Science, WW4-LKO, University of Erlangen-Nuremberg, Martensstr. 7, D-91058 Erlangen, Germany;2. PMC, Electrochemistry and Thin Films Materials, Ecole Polytechnique, 91 128 Palaiseau Cedex, France;1. Beijing National Laboratory for Molecular Sciences, CAS Key Laboratory of Organic Solids, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China;2. Center for Excellence in Nanoscience (CAS), Key Laboratory of Nanosystem and Hierarchical Fabrication (CAS), National Center for Nanoscience and Technology, Beijing 100190, China;1. Centro de Investigação de Montanha (CIMO), Instituto Politécnico de Bragança, Campus de Santa Apolónia, 5300-253 Bragança, Portugal;2. Food Tecnhology Department, SGIT-INIA, Crta. De La Coruña, Km 7.5, 28040 Madrid, Spain;3. Centre for the Food Quality, INIA, C/Universidad s/n, 42004 Soria, Spain;1. Key Laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong University, Beijing 100044, China;2. Organic Semiconductor Research Center, Chongqing Institute of Green and Intelligent Technology, Chongqing School, University of Chinese Academy of Sciences (UCAS Chongqing), Chinese Academy of Sciences, Chongqing 400714, China;3. State Centre for International Cooperation on Designer Low-Carbon & Environmental Materials, School of Materials Science and Engineering, Zhengzhou University, Zhengzhou 450001, Henan, China;1. Centre for Organic Electronics, University of Newcastle, Callaghan, NSW, 2308, Australia;2. Australia Future Industries Institute, The University of South Australia, Mawson Lakes, SA, 5095, Australia;3. Department of Physics, Tadulako University, Kampus Bumi Tadulako, Tondo, Palu 94118, Indonesia;1. Department of Organic Chemistry, Faculty of Pharmacy, Al-Azhar University, Cairo, Egypt;2. Department of Pharmaceutical Chemistry, College of Pharmacy, Salman Bin Abdulaziz University, AlKharj, Saudi Arabia;3. Department of Pharmaceutical Chemistry, Faculty of Pharmacy, Al-Azhar University, Cairo, Egypt;4. Department of Pharmaceutical Chemistry, College of Pharmacy, King Saud University, Riyadh, Saudi Arabia;5. Department of Medicinal Chemistry, Faculty of Pharmacy, University of Mansoura, Mansoura, Egypt |
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| Abstract: | In this work, we demonstrate selective electroless deposition of Cu into nanoscratches produced on n-type Si(1 1 1) surfaces covered with an organic monolayer. The organic layer (undecylenic acid) was covalently attached to a hydrogen-terminated Si surface. The nanosize scratches were produced with an atomic force microscope (AFM) in contact mode using a diamond-coated tip. Copper was deposited in the scratched regions with an electroless (immersion plating) approach using a 0.05 M CuSO4 + 1% HF electrolyte. The results show clearly that the organic layer can be used as a mask for the deposition of Cu. Optimization of the electrochemical parameters, leads to a very high selectivity and uniform and well-defined nanostructures. This process represents a novel approach for a direct patterning of Si surfaces using an immersion plating reaction. |
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