| 金刚石膜微结构的慢正电子束测量研究 |
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| 引用本文： | 徐燕,翁惠民,叶邦角,周海洋,王海云,彭成晓,郗传英,成斌,周先意,韩荣典.金刚石膜微结构的慢正电子束测量研究[J].化学物理学报(中文版),2006,19(4):291-293. |
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| 作者姓名： | 徐燕 翁惠民 叶邦角 周海洋 王海云 彭成晓 郗传英 成斌 周先意 韩荣典 |
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| 基金项目： | 国家自然科学基金;国家高技术研究发展计划(863计划) |
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| 摘 要： |
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| 关 键 词： | 金刚石膜 缺陷 慢正电子 扩散长度 |
Micro-structure of PECVD Diamond Films by Slow Positron Beam |
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| Yan Xu,Hui-min Weng,Bang-jiao Ye,Hai-yang Zhou,Hai-yun Wang,Cheng-xiao Peng,Chuan-ying Xi,Bin Cheng,Xian-yi Zhou,Rong-dian Han.Micro-structure of PECVD Diamond Films by Slow Positron Beam[J].化学物理学报(中文版),2006,19(4):291-293. |
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| Authors: | Yan Xu Hui-min Weng Bang-jiao Ye Hai-yang Zhou Hai-yun Wang Cheng-xiao Peng Chuan-ying Xi Bin Cheng Xian-yi Zhou Rong-dian Han |
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| Abstract: | The microstructure of diamond films was studied by slow positron beam and Raman spectroscopy. For the Raman spectroscopy experiment on diamond films, a high fraction of the sp3 hybridized bond was detected in samples. Positron annihilation spectra analysis further illuminated that the concentration and types of defects were different in each sample. S-E curves of all samples showed that diamond crystal structures had obvious variation in each sample. These results indicated that positron annihilation spectroscopy was an effective means to measure microstructure of diamond films. |
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| Keywords: | Diamond film Defect Slow positron Diffusion |
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