TiO2纳米薄膜的溶胶-凝胶工艺制备和表征

通过ｓｏｌ－ｇｅｌ工艺在普通钠钙玻璃表面制备了均匀透明的锐钛矿型ＴｉＯ２纳米薄膜，ＴｉＯ２薄膜的Ｘ射线衍射分析表明，当薄膜的厚度小于０．４６μ时，薄中未出现锐钛矿的衍射峰，随着镀膜次数或薄膜厚度的增加，薄膜中ＴｉＯ２纳米微晶的平均晶粒大小逐渐增大，ＴｉＯ２薄膜的透光率略有减小，其吸收阈值发生了明显的红移，ＸＰＳ实验结果表明：薄膜中除含有Ｔｉ、Ｏ元素外，还有一定量来自有机前驱物中未完全燃烧的碳和少量

Preparation and Characterization of TiO2 Nanometer Thin Films by Sol-gel Process

Transparent anatase TiO2 nanometer thin films were prepared via the sol- gel process using the TiO2 sol solution on soda- lime glass. XRD patterns of films show that the single anatase phase is precipitated when the thickness of TiO2 films is over 0.46 μ m and there is some orientation effect in (101) direction. However, XRD patterns show almost no peaks of anatase when the thickness is smaller than 0.46 μ m, which is attributed to an insufficient content of titanium dioxide. The transmittance of TiO2 films decreases, the average crystalline size of TiO2 films increase and the absorption edge wavelength of TiO2 films becomes larger with increasing cycle times and film thickness. The chemical compositions of the films were analyzed with X- ray photoelectron spectroscopy (XPS). Experiment results show that besides Ti and O elements, there is a certain amount of residual carbon from the starting organometallic components and a small amount of sodium and calcium ions diffused from the glass substrates.