| 等离子体聚合成膜中的活性粒子模拟分析 |
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| 引用本文： | 张昱,金心宇,陈抗生.等离子体聚合成膜中的活性粒子模拟分析[J].物理化学学报,2000,16(10):892-898. |
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| 作者姓名： | 张昱 金心宇 陈抗生 |
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| 作者单位： | Department of Information and Electronic Engineering,Hangzhou 310027 |
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| 基金项目： | 浙江省自然科学基金资助项目 |
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| 摘 要： | 针对等离子体聚合成膜实验中的活性粒子的能量及空间分布问题，运用电磁场理论和Ｍｏｎｔｅ Ｃａｒｌｏ方法模拟分析氢、氧、氮直流辉光放电等离子体中的活性粒子的运动，得出其能量分布图和空间密度分布图，并与离子活性能量范围相比较，从而得出结论：在氢、氧等离子体中有足够多的活性离子可以参与和单体分子的物理化学反应，成膜较快；在氮等离子体中，达到活性粒子能量范围的离子相当少，成膜较慢。
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| 关 键 词： | 粒子能量 Monte Carlo模拟 氢、氧、氮等离子体聚合 |
| 收稿时间： | 2000-01-13 |
| 修稿时间： | 2000-04-17 |
Simulation Analysis of Active Particles in Plasma Polymerization Film Deposition |
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| Zhang Yu,Jin Xinyu,Chen Kangsheng.Simulation Analysis of Active Particles in Plasma Polymerization Film Deposition[J].Acta Physico-Chimica Sinica,2000,16(10):892-898. |
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| Authors: | Zhang Yu Jin Xinyu Chen Kangsheng |
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| Institution: | Department of Information and Electronic Engineering,Hangzhou 310027 |
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| Abstract: | The active particles movements in hydrogen,oxygen and nitrogen DC glow discharge plasma have been simulated and analyzed by applying the electromagnetic theories and Monte Carlo simulation techniques.The energy and spatial density distribution graphs have been obtained.By comparison with the active energy range of ions,the results showed that in hydrogen and oxygen plasma there are sufficient active ions to participate in the physical and chemical reactions with the monomer molecules,which resulted in high deposition speed; in nitrogen plasma there are very few ions with sufficient active energy,which resulted in low deposition speed. |
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| Keywords: | Particle energy Monte Carlo simulation Hydrogen Oxygen Nitrogen Plasma polymerization |
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