| 角分辨飞行时间法研究紫外激光烧蚀Ta2O5的反应 |
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| 引用本文： | 韩镇辉,陆建江,党海军,戴自国,秦启宗.角分辨飞行时间法研究紫外激光烧蚀Ta2O5的反应[J].物理化学学报,1997,13(2):140-145. |
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| 作者姓名： | 韩镇辉 陆建江 党海军 戴自国 秦启宗 |
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| 作者单位： | Laser Chemistry Institute,Fudan University,Shanghai 200433 |
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| 摘 要： | 利用角分辨飞行时间法研究了３５５ｎｍ脉冲激光烧蚀Ｔａ２Ｏ５的反应，由四极质谱测得的煤蚀产物除了Ｏ，Ｔａ，ＴａＯ和ＴａＯ２中性碎片外，在较高激光能量密度时还有Ｏ，Ｔａ，ＴａＯ，ＴａＯ２离子碎片，它们的飞行时间（ＴＯＦ）谱可以用于级分带质心速度的Ｍａｘｗｅｌｌ－Ｂｏｌｚｔｍａｎｎ分布函数较好地拟合，原生离子碎片的平均动能与激光能量密度无关，烧蚀产物原生离子和中性粒子的角分布可以分别用ａｃｏｓ＾ｎθ（ｎ
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| 关 键 词： | Ta2O5 激光烧蚀 飞行时间谱 角分布 |
| 收稿时间： | 1996-08-05 |
| 修稿时间： | 1996-10-21 |
An Angle-resolved TOF Study on the UV Laser Ablation of Tantalum Oxide |
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| Han Zhenhui, Lu Jianjiang ,Dang Haijun ,Dai Ziguo, Qin Qizong.An Angle-resolved TOF Study on the UV Laser Ablation of Tantalum Oxide[J].Acta Physico-Chimica Sinica,1997,13(2):140-145. |
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| Authors: | Han Zhenhui Lu Jianjiang Dang Haijun Dai Ziguo Qin Qizong |
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| Institution: | Laser Chemistry Institute,Fudan University,Shanghai 200433 |
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| Abstract: | UV pulsed laser ablation of tantalum oxide at 355nm has been investigated by angle-resolved time-of-flight quadrupole mass spectrometric method. The measured TOF spectra show that the main ablation neutral products are O, Ta, TaO and TaO2, and the corresponding ionic species are observed with increasing the laser fluence. Their TOF spectra can be fitted by multicomponent Maxwell-Bolztmann distributions with a center-of-mass velocity, and the translational energies of the ionic species are independent on the laser fluence under our experimental conditions. The angular distributions of the ionic and neutral ablation products can be fitted by the expressions of acosnθ(n≈26 ) and acosθ+bcosnθ (n≈27), respectively. Possible mechanisms for the production of these species in the UV laser ablation process are discussed. |
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| Keywords: | Ta_2O_5 Laser ablation Time-of-flight spectrometry Angular distribution |
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