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氮化镓粉末的溶胶凝胶法制备及其结构
引用本文:刘亦安,薛成山,庄惠照,张晓凯,田德恒,吴玉新,孙莉莉,艾玉杰,王福学.氮化镓粉末的溶胶凝胶法制备及其结构[J].物理化学学报,2006,22(6):657-660.
作者姓名:刘亦安  薛成山  庄惠照  张晓凯  田德恒  吴玉新  孙莉莉  艾玉杰  王福学
作者单位:Institute of Semiconductors, College of Physics and Electronics, Shandong Normal University, Jinan 250014, P. R. China
基金项目:教育部科学技术研究项目
摘    要:报道了一种新颖而有效的二步制备氮化镓粉末的方法. 以乙氧基镓Ga(OC2H5)3作前驱体, 利用溶胶-凝胶法和高温氨化法相结合, 在950 ℃氨化温度下, 将凝胶与流动的NH3反应20 min, 合成了GaN粉末. XRD、FTIR、TEM及SAED的测量结果表明, GaN粉末是六方纤锌矿结构的单晶晶粒, 粉末粒度较均匀, FTIR吸收谱有明显的宽化现象.

关 键 词:溶胶-凝胶法  氨化温度  GaN粉末  
收稿时间:2005-11-07
修稿时间:2006-01-13

Structure and Synthesis of GaN Powder by Sol-Gel Method
LIU,Yi-An,XUE,Cheng-Shan,ZHUANG,Hui-Zhao,ZHANG,Xiao-Kai,TIAN,De-Heng,WU,Yu-Xin,SUN,Li-Li,AI,Yu-Jie,WANG,Fu-Xue.Structure and Synthesis of GaN Powder by Sol-Gel Method[J].Acta Physico-Chimica Sinica,2006,22(6):657-660.
Authors:LIU  Yi-An  XUE  Cheng-Shan  ZHUANG  Hui-Zhao  ZHANG  Xiao-Kai  TIAN  De-Heng  WU  Yu-Xin  SUN  Li-Li  AI  Yu-Jie  WANG  Fu-Xue
Institution:Institute of Semiconductors, College of Physics and Electronics, Shandong Normal University, Jinan 250014, P. R. China
Abstract:A novel and efficient method was applied to prepare gallium nitride (GaN) powder. Hexagonal gallium nitride (GaN) powder was successfully synthesized by means of a combination of sol-gel process with high temperature ammoniation using Ga(OC2H5)3 as a precursor. Ammoniation of Ga2O3 gel was conducted in the flow of NH3 gas at 950 ℃ for 20 min. Measurement results by XRD, FTIR, TEM, and SAED indicate that the synthesised GaN is of a single-phase hexagonal wurtzite structure, and the granularity of the GaN powder has a good uniformity. In addtion, the FTIR shows a distinct peak broadening.
Keywords:Sol-gel method  Ammoniation temperature  GaN powder
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