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Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon
Institution:1. State Key Laboratory of High-efficiency Utilization of Coal and Green Chemical Engineering, College of Chemistry and Chemical Engineering, Ningxia University, Yinchuan 750021, China;2. Joint International Research Laboratory of Biomass Energy and Materials, Co-Innovation Center of Efficient Processing and Utilization of Forest Resources, College of Materials Science and Engineering, Nanjing Forestry University, Nanjing 210037, China;3. Xi''an Thermal Power Research Institute Co., Ltd, Xi''an 710000, China;4. Institute of Clean Coal Technology, East China University of Science and Technology, Shanghai 200237, China;1. National Institute for Lasers, Plasma and Radiation Physics, 077125 Bucharest, Romania;2. Department of Physics, Gh. Asachi Technical University, 700050 Iasi, Romania;3. Univ. Lille, CNRS, UMR 8523 - PhLAM - Physique des Lasers Atomes et Molécules, F-59000 Lille, France
Abstract:The electron number density and temperature during the early phase (<300 ns) of laser-induced plasmas from silicon using a 266-nm, 3-ns Nd:YAG laser were deduced via spectroscopic methods. These parameters were measured as a function of delay time vs. irradiance in the range of 2–80 GW/cm2, and compared with crater volume measurements. A dramatic change in plasma characteristics (electron number density, temperature, and degree of ionization) as well as a sharp increase of mass removal was observed when the irradiance was increased beyond a threshold of 20 GW/cm2. Possible mechanisms such as inverse bremsstrahlung and self-regulation were used to describe these data in the low irradiance region. Laser self-focusing and critical temperature are discussed to explain the dramatic changes after the irradiance reaches the threshold.
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