PTFE nanoemulsions as ultralow-k dielectric materials |
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| Authors: | Paola Machetta Marco Lazzarino Valeri Kapeliouchko Tiziana Poggio Giorgio Canil Aldo Sanguineti Vincenzo Arcella |
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| Institution: | 1. Laboratorio TASC-INFM SS 14, Km 163,5 Basovizza I-34012 Trieste Italy;2. Ausimont S.p.A., p.le Donegani 5/6, 15047 Spinetta Marengo (AL) Italy;3. Ausimont S.p.A., v.le Lombardia 20, I-20021 Bollate (MI) Italy |
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| Abstract: | Modern integrated circuits require insulating materials with a dielectric constant as low as possible in order to obtain device speed improvements through lower RC delay. We have investigated the electrical and structural properties of PTFE thin films obtained from Algoflon®-PTFE nanoemulsions, via spin coating deposition, followed by sintering. Films as thin as 160 nm with dielectric strength better than 4 MV/cm have been obtained. |
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