Atmospheric pressure chemical vapour deposition of selenium and tellurium films by UV laser photolysis of diethyl selenium and diethyl tellurium |
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| Authors: | Josef Pola Zden k Bastl Jan &#x;ubrt Akihiko Ouchi |
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| Institution: | Josef Pola,Zdeněk Bastl,Jan Šubrt,Akihiko Ouchi |
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| Abstract: | Excimer laser‐induced photolysis of gaseous diethyl selenium and diethyl tellurium (C2H5)2M (M = Se, Te) is controlled by cleavage of both M? C bonds, it yields C1–C4 hydrocarbons (ethene as major product) and results in chemical vapour deposition of selenium films and nanosized tellurium powder. The selenium and tellurium properties were characterized by X‐ray photoelectron spectroscopy and Scanning electron Microscopy techniques. Copyright © 2001 John Wiley & Sons, Ltd. |
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| Keywords: | diethyl selenium diethyl tellurium UV laser photolysis chemical vapour deposition selenium films tellurium powder |
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