集成化金膜阵列电极的制作研究

以聚乙烯不干胶掩膜版法结合金属溅射沉积技术在FR-4玻璃纤维版上制作了由6个金膜工作电极(1 mm×2 mm)、1个大面积金膜对电极(2 mm×13 mm)和1个厚膜Ag/AgCl参比电极构成的集成化金膜阵列电极系统,并利用电化学手段对阵列电极系统进行了考察。研究结果表明,K3Fe(CN)6在厚膜Ag/AgCl/1.0 mol/L NaCl参比电极上的式电位与商业Ag/AgCl/3.0 mol/L NaCl参比电极相差0.067 V;参比电极放置1个月后,测量电位未发生明显变化。利用扫描电化学显微镜对工作电极表面平整度进行考察,结果表明工作电极表面具有较好的平整度。通过测量H2SO4还原峰面积评价了工作电极电化学面积的批内、批间一致性;通过K3Fe(CN)6在电极上的Ipa/Ipc比值评价了工作电极电化学特性的批内、批间一致性。结果表明,阵列电极面积和电化学特性具有良好的批内和批间一致性。对集成化金膜阵列电极系统的研究结果表明,聚乙烯不干胶掩膜版法结合金属溅射沉积技术制作的阵列电极能够满足电化学电极的要求,可作为电化学生物传感器的基础电极。

Fabrication of the Integrated Gold Film Multi-electrode Array

A stable integrated gold film multi-electrode array,including six gold working electrodes(1 mm×2 mm),a gold counter electrode(2 mm×13 mm) and a thick-film Ag/AgCl reference electrode,was fabricated by mask technique of polyethylene sticky film and the gold sputtering technique on FR-4 glass fiber substrate.The electrochemical characteristics of the multi-electrode array fabricated were investigated using electrochemical methods.There was a negative shift of 0.067 V obtained on the thick-film Ag/AgCl reference electrode fabricated compared with a commercial Ag/AgCl/3.0 mol/L NaCl reference electrode.After one month,the potential of reference electrode did not change obviously.The surface roughness of the working electrodes was studied by scanning electrochemical microscope(SECM).The satisfied surface roughness was obtained.The reproducibility of electrochemical areas and properties of the gold working electrodes were evaluated by the cathodic peak areas in 0.10 mol/L H2SO4 aqueous solution and the Ipa/Ipc values in 5.0 mmol/L K3Fe(CN)6 aqueous solution,and satisfactory results were obtained.This work demonstrated that the multi-electrode array fabricated can be utilized as electrode system for following electrochemical studies.Multi-electrode array can be further applied as a basis electrode in the design and fabrication of electrochemical biosensor array.