Synthesis of well‐defined and end‐polymerizable star‐shaped polysulfides and their application to negative photoresist |
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| Authors: | Mitsuhiro Hirata Yutaka Abe Bungo Ochiai Takeshi Endo |
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| Institution: | 1. Yamagata Research Institute of Technology, 2‐2‐1 Matsuei, Yamagata, Yamagata 990‐2473, Japan;2. Department of Material Science and Energy Engineering, Graduate School of Science and Engineering, Yamagata University 4‐13‐16 Jonan, Yonezawa, Yamagata 992‐8510, Japan;3. Molecular Engineering Institute, Kinki University, 11‐6 Kayanomori, Iizuka, Fukuoka 814‐0193, Japan |
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| Abstract: | Various star‐shaped poly(phenoxy propylene sulfide)s (PPSs) bearing curable end groups were synthesized by the functionalization of the propagating ends of star‐shaped poly(PPS) with various electrophilies. The functionalization with chloromethyl styrene proceeded quantitatively, and afforded polymers with Mn almost agreed with theoretical value and narrow Mw/Mn. The photocuring conditions were optimized, and the addition of 10 wt % of poly(ethylene glycol) diacrylate was effective to attain sufficient crosslinking. The photocuring reaction of the end‐functionalized poly(PPS) films cast on silicon wafers was conducted by UV irradiation. The cured poly (PPS)s became insoluble in THF, supporting the sufficient crosslinking. Developing of a cured polymer yielded a negative photoresist pattern. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2010 |
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| Keywords: | anionic polymerization end functionalization photoresists polysulfides star polymers |
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