Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma |
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| Authors: | Sorin D Anghel Tiberiu Frentiu Eugen Darvasi Ana-Maria Rusu Alpar Simon E A Cordos |
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| Institution: | Physics Department, University of Cluj, 3400, Cluj-Napoca, Romania. |
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| Abstract: | The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes. |
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