样品表面污染对X射线光电子能谱定量分析的影响

用X射线光电子能谱(XPS)研究了表面碳污染物对样品的元素相对定量误差的影响。结果表明,样品表面含有碳污染物能引起光电子动能较低的元素的相对定量分析结果偏低,而且样品中两种元素的光电子动能差越大,相对误差越大。在用元素灵敏因子法进行XPS定量分析时,样品表面污染是不可忽略的误差来源。

Effects of Contamination on Sample Surface to the Quantitative Analysis by X-ray Photoelectron Spectroscopy

X-ray photoelectron spectroscopy(XPS) was applied to the study of the effect of contamination of organic carbon on the surface of the sample to the accuracy of quantitative analysis for its componential elements.As shown by the experimental results,that the presence of carbon contaminants on the sample surface led to negative deviation of relative quantitative-analytical results for elements with relatively low photoelectron kinetic energy,and that larger the difference between the values of photoelectron kinetic energy of two different elements,the greater will be the relative deviation of the results.Hence,the contamination of sample surface is one of the possible sources of errors of XPS analysis,especially in using the method of elemental sensitivity factors,and this should not be overlooked anyhow.