| Synthesis and Characterization of Pr（DPM）3 Served as Precursor for MOCVD |
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| 作者姓名： | LIU Ming-fei HU Yong-xing JIANG Yin-zhu GAO Jian-feng WANG Yan-yan MENG Guang-yao |
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| 作者单位： | USTC Laboratory for Solid State Chemistry ＆ Inorganic Membranes, Department of Materials Science and Engineering, University of Science and Technology of China, Hefei 230026, P. R. China |
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| 摘 要： | Praseodymium β-diketone chelate, Pr(DPM)3 DPM=2,2,6,6-tetramethyl-3,5-heptanedionato], was successfully synthesized from the inorganic salt praseodymium chloride and HDPM(2,2,6,6-tetramethyl-3,5-heptane-dione) in an ethanol/aqueous solution followed distillation at low pressure and recrystallization from toluene. The physical and thermal properties of the chelate, including volatility, stability, and thermal decomposition, were investigated by elemental analyses, 1H NMR spectroscopy, XRD, TG/DTG/DTA analysis, infrared spectroscopy, and mass spectroscopy. The chelate with high purity prepared by thes of this study also shows sufficient volatility and stability in inert gases, which could be used as the precursor for metal-organic chemical vapor deposition(MOCVD).
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| 关 键 词： | 镨β-二酮螯合物 Pr（DPM）3 MOCVD 前体 化学合成 性质 红外光谱 |
| 收稿时间： | 21 June 2006. |
| 修稿时间： | 2006-06-21 |
Synthesis and Characterization of Pr(DPM)3 Served as Precursor for MOCVD |
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| LIU Ming-fei HU Yong-xing JIANG Yin-zhu GAO Jian-feng WANG Yan-yan MENG Guang-yao.Synthesis and Characterization of Pr(DPM)3 Served as Precursor for MOCVD[J].Chemical Research in Chinese University,2007,23(3):258-262. |
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| Authors: | Ming-fei LIU Yong-xing HU Yin-zhu JIANG Jian-feng GAO Yan-yan WANG Guang-yao MENG |
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| Institution: | aUSTC Laboratory for Solid State Chemistry & Inorganic Membranes, Department of Materials Science and Engineering, University of Science and Technology of China, Hefei 230026, P. R. China |
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| Abstract: | Praseodymium β-diketone chelate, Pr(DPM) 3 DPM=2,2,6,6-tetramethyl-3,5-heptanedionato], was successfully synthesized from the inorganic salt praseodymium chloride and HDPM(2,2,6,6-tetramethyl-3,5-heptane-dione) in an ethanol/aqueous solution followed distillation at low pressure and recrystallization from toluene. The physical and thermal properties of the chelate, including volatility, stability, and thermal decomposition, were investigated by elemental analyses, 1H NMR spectroscopy, XRD, TG/DTG/DTA analysis, infrared spectroscopy, and mass spectroscopy. The chelate with high purity prepared by the authors of this study also shows sufficient volatility and stability in inert gases, which could be used as the precursor for metal-organic chemical vapor deposition(MOCVD). |
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| Keywords: | MOCVD Chemical synthesis Thermo-gravimetric analysis Infrared spectroscopy |
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