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Investigation of Rotating Arc-Catalytic Reactor for CF4 Removal with High Energy Efficiency |
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| Authors: | Jo Sungkwon Cho Donghyun Lee Dae Hoon Kang Woo Seok |
| Institution: | 1.Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon, 34103, Republic of Korea ;2.University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon, 34113, Republic of Korea ; |
| Abstract: | Plasma Chemistry and Plasma Processing - CF4 is commonly used in semiconductor industries, and its removal requires a large amount of energy because it is a highly stable perfluorinated compound.... |
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