Reaction Mechanisms in Both a CCl2F2/O2/Ar and a CCl2F2/H2/Ar RF Plasma Environment

Decomposition of dichlorodifluoromethane (CCl₂F₂ or CFC-12) in aradiofrequency (RF) plasma system is demonstrated. The CCl₂F₂decomposition fractions _{CCl 2 F 2} and mole fractionsof detected products in the effluent gas stream of CCl₂F₂/O₂/Ar andCCl₂F₂/H₂/Ar plasma, respectively, have been determined. The experimentalparameters including input power wattage, O₂/CCl₂F₂ or H₂/CCl₂F₂ ratio,operational pressure, and CCl₂F₂ feeding concentration wereinvestigated. The main carbonaceous product in the CCl₂F₂/O₂/Arplasma system was CO₂, while that in the CCl₂F₂/H₂/Ar plasma systemwas CH₄ and C₂H₂. Furthermore, the possible reaction pathways werebuilt-up and elucidated in this study. The results of the experimentsshowed that the highly electronegative chlorine and fluorine wouldeasily separate from the CCl₂F₂ molecule and combine with the addedreaction gas. This led to the reactions terminated with the CO₂,CH₄, and C₂H₂ formation, because of their high bonding strength. Theaddition of hydrogen would form a preferential pathway for the HCland HF formations, which were thermodynamically stable diatomicspecies that would limit the production of CCl₃F, CClF₃, CF₄, andCCl₄. In addition, the HCl and HF could be removed by neutral orscrubber method. Hence, a hydrogen-based RF plasma system provideda better alternative to decompose CCl₂F₂.