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Modeling of Atmospheric-Pressure Dielectric Barrier Discharges in Argon with Small Admixtures of Tetramethylsilane |
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| Authors: | Loffhagen Detlef Becker Markus M Czerny Andreas K Klages Claus-Peter |
| Institution: | 1.Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489, Greifswald, Germany ;2.Institute for Surface Technology, Technische Universit?t Braunschweig, Bienroder Weg 54 E, 38108, Braunschweig, Germany ; |
| Abstract: | Plasma Chemistry and Plasma Processing - A time-dependent, spatially one-dimensional fluid-Poisson model is applied to analyze the impact of small amounts of tetramethylsilane (TMS) as precursor on... |
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