Optical emission spectroscopy and actinometry in CCl4-Cl2 radiofrequency discharges

Radiofrequency discharges fed with CCl₄-Cl₂ mixtures have been studied in the pressure range 0.3 to 0.6 torr by means of emission spectroscopic actinometry with Ar, He, and N₂ as actinometers. Two different reactors, a parallel plate and a capacitively coupled tubular one, have been utilized for this study to obtain information for a large range of electron energy distributions. Analysis of the experimental results demonstrates the following: the utilization of actinometry and its range of validity, the importance of electron attachment to CCl_x species during the plasma decomposition process, and the effects of the presence of chlorine and “glowpolymer” in the discharge medium.