应用于神经通路研究的微机电系统探针与低功耗低噪声单集成芯片系统

针对神经内海马区谷氨酸化学递质与神经电生理信号的并行双模检测需要, 设计了8通道电化学递质与电生理双模并行检测传感芯片微系统, 系统组件包括:基于SOI(Silicon-on-insulator)工艺衬底制备的微机电系统MEMS(Micro-electro-mechanical system)神经信息检测探针、低噪声颅内神经电小信号放大器、低功耗中速SAR(Successive approximation register)-ADC(Analog/Digital Converter)模/数转换器、精简低能耗OOK(On-Off-Keying)/FSK(Frequency-Shift-Keying)调制射频发射器.本微型神经信息传感芯片系统具有体积小、抗干扰、化学递质与电生理信号并行检测、灵敏性好、线性度高等特点.对电生理裸探针的4个电生理位点表面沉积铂黑, 电极阻抗优化为35.0 kΩ;通过酶固定技术在谷氨酸检测位点上纳米定向修饰酶复膜结构(Pt-mPD-GluOx)以形成具有特异选择性的生物识别点, 实现神经化学递质谷氨酸的检测;在6～35 μmol/L谷氨酸浓度范围内线性度是0.97, 单位面积灵敏度是0.0069 pA/(μmol/L), 电流响应误差<3.0 pA, 表明此探针可以实现特异选择功能.同时, 基于数模混合180 nm的ASIC(Application specific integrated circuit)芯片制造工艺(SmicRF180 nm 1Poly6M)制造的神经电生理传感后端信息调理单芯片, 其内部关键测试指标:微弱小信号低噪系电压放大器(等效输入噪声电压≤0.7 μV rms, 增益>70 dB, 电源/共模抑制比>100 dB等)、SAR-ADC(有效量化位数是12 bits, 功耗1.2 mW, 最大转换速率1 Msps, 信噪比为60.9 dB)、ASK/FSK调制的射频发射器(功放PA 4～5 dBm, 输出功率满足10 m辐射距离).此微型神经信息感知处理芯片集成检测系统, 可为海马区神经通路的研究提供便携、普适性的无线可穿戴设备.

Application of Micro-Electro-Mechanical-System Probe and Low-power & Low-noise Single Chip Integration System in Neural Loop Researching

A 8-channel neural signal′s simultaneous transducer detection micro system was developed to research the neural loop located at the brain hippocampus zone. The components of the system contained the neural probe manufactured with the Micro-electro-mechanical-systems (MEMS) technique based on silicon-on-insulator (SOI) substrate, biological low noise chopper-stabilization amplifier, low noise and intermediate speed SAR-ADC converter, reduced and low power ASK/FSK modulation radio transmitter. The micro system was applicable with the characters of small volume, interferences free, neural electrophysiology and neurotransmitter simultaneous detection, high sensitivity, high linearity, etc. The electrode resistance was optimized to 35.0 kΩ after depositing nanometer platinum black on the 4 electrophysiological sites on the Pt electrode. With the modification enzyme technique, nanomaterial enzyme membrane (Pt-mPD-GluOx) was directly fixed on the glutamate detection locus for selectively detecting special neural neurotransmitter matter. In addition, the electrochemistry measurement results indicated that the linear range of glutamate was 6-35 μmol/L with correlation coefficient of 0.97, the sensitivity was 0.0069 pA/(μmol/L). The current response error was less than 3.0 pA, which showed that the neural needle satisfied differential selection. Also, the logic/analog mixed signal 180-nm Application specific integrated circuit (ASIC ) technique (SmicRF180 nm 1Poly6M) was used to manufacture the transducer back-end disposing IC chip, and the test results provided some key parameters such as chopper-stabilization amplifier (equivalent in putting noise voltage ≤0.7 μV rms@1 kHz, gain of 71-82 dB, CMRR/PSRR>100 dB), SAR-ADC (ENOB is 12 bits, power consumption is 1.2 mW when maxmium conversion speed is 1 Msps, signal-noise-ratio is 60.9 dB, etc), and ASK/FSK modulation radio transmitter (the PA′s outputting power of 4-5 dBm, the radiation range of 10 meters). The micro neural transducer integrated system was convenient and wireless wearable for the research of brain hippocampus region.