Reliable fabrication method of transferable micron scale metal pattern for poly(dimethylsiloxane) metallization |
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Authors: | Lim Kwan Seop Chang Woo-Jin Koo Yoon-Mo Bashir Rashid |
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Institution: | Birck Nanotechnology Center and Bindley Bioscience Center, School of Electrical and Computer Engineering, Weldon School of Biomedical Engineering, Purdue University, West Lafayette, USA. |
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Abstract: | We have developed a reliable fabrication method of forming micron scale metal patterns on poly(dimethylsiloxane) (PDMS) using a pattern transfer process. A metal stack layer consisting of Au-Ti-Au layers, providing a weak but reliable adhesion, was deposited on a silicon wafer. The metal stack layer was then transferred to a PDMS substrate using serial and selective etching. We demonstrate that features as small as 2 microm were reliably transferred on to the PDMS substrate for use as interconnects and electrodes for biosensors and flexible electronics application. |
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