甲基丙烯酸(2-烷基-2-金刚烷)酯的合成及水解研究

甲基丙烯酸(2-甲基-2-金刚烷)酯和甲基丙烯酸(2-乙基-2-金刚烷)酯是两个重要的193nm光刻胶主体树脂的单体.两个化合物是由2-金刚酮与碘甲烷、碘乙烷的格氏试剂反应得到2-甲基-2-金刚醇、2-乙基-2-金刚醇,然后在氢化钠的作用下与甲基丙烯酰氯发生酯化反应制得.酯化产率50%—60%.产品结构经¹HNMR、IR、MS和元素分析表征.在对甲基苯磺酸-水合物的催化作用下对两个单体进行了水解测试,探讨了水解机理,计算出水解速率常数k,k值分别为-1.52和-3.90.

The Synthesis and Hydrolysis Evaluation of 2-Alkyl Adamantine-2-yl Methacrylate

2-methyl adamantine-2-yl methacrylate and 2-ethyl adamantine-2-yl methacrylate are two important monomers of matrix polymer for 193 nm photoresist. The two compounds are synthesized based on utilizing methylmagnesium iodide(ethylmagnesium iodide) as Grinard reagent reacted with 2-adamantone to provide 2-methyl(ethyl) adamantine-2-yl which then esterified with methacryloyl chloride in the presence of NaH to provide the target compounds with the yields of 50—60%. The structures of the compounds are confirmed by 1HNMR, IR, MS and Elementary Analysis. The hydrolysis test was carried out using TsOH·H2O as catalyst and the hydrolysis mechanism was discussed. The calculated hydrolysis rate constants k are -1.52 and -3.90, respectively.