晶体硅金刚线切割废料制备高纯氮化硅

以晶体硅金刚线切割废料为原料,通过氮化反应制得氮化硅,既回收了金刚线切割废料,又解决了环境污染的问题。通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)和X射线能量色谱仪(EDS)等技术手段研究了原料经HCl和HF酸洗净化后制备氮化产物的物相组成、组分质量分数和微观形貌的影响。结果表明,HCl酸洗后切割废料制备的氮化产物中主要物相为Si_2N_2O和Si_3N_4,而HF酸洗后切割废料制备的氮化产物中主要物相为Si_3N_4。氮化产物中Si_2N_2O的形成与切割废料中SiO_2的质量分数有关,降低原料中SiO_2的质量分数是切割废料经过高温氮化制得氮化硅的前提。

Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

Silicon nitride was prepared through nitriding the diamond-wire cutting waste, which not only recycles the diamond-wire cutting waste but also improves the environment. The influence of HCl and HF on the phase composition, component content and microtopography of nitride products were analyzed by X-ray diffraction(XRD), scanning electron microscopy(SEM) and energy dispersive spectrometer(EDS). The results show that the phases in nitride samples fabricated from the HCl-soaked cutting waste are mainly Si₂N₂O and Si₃N₄. However, the phases in nitride samples fabricated from the HF-soaked cutting waste is mostly Si₃N₄. Si₂N₂O in nitride samples is related to the mass fraction of SiO₂ in cutting waste, and the precondition of producing Si₃N₄ from cutting waste by high temperature nitriding is to reduce the mass fraction of SiO₂ in cutting waste.