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热处理对SILAR法制备CuInSe2薄膜性能的影响
引用本文:杨建立,靳正国,石勇,李春艳,安贺松.热处理对SILAR法制备CuInSe2薄膜性能的影响[J].无机化学学报,2005,21(11):1701-1704.
作者姓名:杨建立  靳正国  石勇  李春艳  安贺松
作者单位:天津大学先进陶瓷与加工技术教育部重点实验室,天津 300072,天津大学先进陶瓷与加工技术教育部重点实验室,天津 300072,天津大学先进陶瓷与加工技术教育部重点实验室,天津 300072,天津大学先进陶瓷与加工技术教育部重点实验室,天津 300072,天津大学先进陶瓷与加工技术教育部重点实验室,天津 300072
基金项目:天津市重点基础研究项目(No.33802311)资助.
摘    要:CuInSe2 ternary films were prepared by successive ionic layer absorption and reaction (SILAR) method. The films were deposited on glass substrates at room temperature and subject to heat-treatment under Ar atmosphere at various calcination temperatures, and then characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), optical absorption spectroscopy. XRD results showed that chalcopyrite structure CuInSe2 with high degree of preferred orientation towards (112) reflection could be obtained by post-heat treatment. The compositions of films calcined at 300~400 ℃ were close to the standard stoichiometry and Cl impurity decreased after calcination. The direct band gap increased from 0.94 eV to 0.98 eV with the increase of calcination temperature.

关 键 词:CuInSe2薄膜    SILAR法    煅烧温度    光学性能
文章编号:1001-4861(2005)11-1701-04
收稿时间:2005-03-28
修稿时间:6/5/2005 12:00:00 AM

Effects of Post-heat Treatment on Performance of Chalcopyrite CuInSe2 Film Prepared by SILAR Method
YANG Jian-Li,JIN Zheng-Guo,SHI Yong,LI Chun-Yan and AN He-Song.Effects of Post-heat Treatment on Performance of Chalcopyrite CuInSe2 Film Prepared by SILAR Method[J].Chinese Journal of Inorganic Chemistry,2005,21(11):1701-1704.
Authors:YANG Jian-Li  JIN Zheng-Guo  SHI Yong  LI Chun-Yan and AN He-Song
Institution:Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education, School of Materials, Tianjin University, Tianjin 300072,Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education, School of Materials, Tianjin University, Tianjin 300072,Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education, School of Materials, Tianjin University, Tianjin 300072,Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education, School of Materials, Tianjin University, Tianjin 300072 and Key Laboratory For Advanced Ceramics and Machining Technology of Ministry of Education, School of Materials, Tianjin University, Tianjin 300072
Abstract:
Keywords:CuInSe2 films  SILAR method  calcination temperature  optical properties
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