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| 催化增强化学蒸气沉积法在聚酰亚胺上沉积钯-铂合金薄层 | |
| 引用本文： | 俞开潮,YousefHamadan,程银华,周锦兰,李正佳,于澍燕,焦庆.催化增强化学蒸气沉积法在聚酰亚胺上沉积钯-铂合金薄层[J].无机化学学报,2006,22(5):789-794. |
| 作者姓名： | 俞开潮 YousefHamadan 程银华 周锦兰 李正佳 于澍燕 焦庆 |
| 作者单位： | 1. 华中科技大学化学系 2. 武汉光电国家实验室,武汉,430074 3. 中国科学院化学研究所,高分子物理与化学国家重点实验室,北京,100080 |
| 基金项目： | 国家自然科学基金;国家重点实验室基金 |
| 摘 要： | 以N2，O2作载气，通过催化增强化学蒸气沉积(CECVD)分别制得在聚酰亚胺上的金属铂、钯及其合金薄层。铂、钯配合物的共同沉积可生成Pt-Pd合金薄膜。在Pd-Pt合金的沉积过程中，Pd/Pt的原子数比率随共同沉积的条件改变而变化。O2为载气、300 ℃条件下,用Pd(η3-allyl)(hfac)和Pt(COD)Me2作前驱体共沉积制备Pd-Pt合金，得到含Pd 37.2%，Pt 62.8%且不 |
| 关 键 词： | 催化增强化学蒸气沉积 聚酰亚胺 钯-铂合金 |
| 文章编号： | 1001-4861(2006)05-0789-06 |
| 收稿时间： | 2005-05-08 |
| 修稿时间： | 2006-01-12 |
Formation of Palladium-Platinum Alloy Films on Polyimide by Catalyst-Enhanced Chemical Vapor Deposition |
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| YU Kai-Chao,Yousef Hamadan,CHENG Yin-Hu,ZHOU Jin-Lan,LI Zheng-Ji,YU Shu-Yan and JIAO Qing.Formation of Palladium-Platinum Alloy Films on Polyimide by Catalyst-Enhanced Chemical Vapor Deposition[J].Chinese Journal of Inorganic Chemistry,2006,22(5):789-794. | |
| Authors: | YU Kai-Chao Yousef Hamadan CHENG Yin-Hu ZHOU Jin-Lan LI Zheng-Ji YU Shu-Yan and JIAO Qing |
| Institution: | Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074,Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074,Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074,Department of Chemistry, Huazhong University of Science and Technology, Wuhan 430074,Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074,State Key Laboratory of Polymer Physics and Chemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080 and State Key Laboratory of Polymer Physics and Chemistry, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080 |
| Abstract: | Pd, Pt and their alloy films on polyimide were prepared by Catalyst-Enhanced Chemical Vapor Deposition (CECVD) under the carrier gas (N2, O2). Co-deposition of Pd and Pt complexes was used for deposition of alloy film. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios varied with co-deposition conditions. Co-deposition of Pd(η3-allyl)(hfac) and Pt(COD)Me2 under O2 at 300 ℃ produced palladium-platinum alloy containing palladium of 37.2% and platinum of 62.8%, respectively without the contamination of carbon and fluorine. |
| Keywords: | catalyst-enhanced chemical vapor deposition polyimide (PI) palladium-platinum alloy |
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