| 用XPS和XAES分析电化学沉积的DLC膜 |
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| 引用本文： | 阎兴斌,徐洮,王博,杨生荣.用XPS和XAES分析电化学沉积的DLC膜[J].无机化学学报,2003,19(6):569-573. |
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| 作者姓名： | 阎兴斌 徐洮 王博 杨生荣 |
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| 作者单位： | 中科院兰州化学物理研究所固体润滑国家重点实验室,兰州,730000 |
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| 基金项目： | 国家自然科学基金资助项目(No.50172052,50175105)，中科院百人计划资助项目。 |
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| 摘 要： | 采用电化学沉积方法，以甲醇溶剂作碳源，直流电压作用下在单晶硅表面沉积得到碳薄膜。通过研究石墨、金刚石和样品薄膜的XPS和XAES谱图特征，证明了此方法沉积得到的是DLC薄膜;利用曲线拟合技术在C1s电子能谱图中拟合出sp3峰与sp2峰，并计算出样品薄膜中sp3碳的相对含量为55%;研究石墨、金刚石和样品薄膜的一阶微分XAES谱图，用线性插入法估算出样品薄膜中sp3碳的相对含量为60%。
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| 关 键 词： | 类金刚石碳膜 电化学沉积 XPS XAES |
| 修稿时间： | 2002年11月20 |
By XPS and XAES Study Diamond-like Carbon Films from Electrochemical Deposition |
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| YAN Xing-Bin,XU Tao,WANG Bo and YANG Sheng-Rong.By XPS and XAES Study Diamond-like Carbon Films from Electrochemical Deposition[J].Chinese Journal of Inorganic Chemistry,2003,19(6):569-573. |
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| Authors: | YAN Xing-Bin XU Tao WANG Bo and YANG Sheng-Rong |
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| Abstract: | The carbon film was deposited on silicon substrates by the electrolysis of methanol. XPS and XAES spectra show that the sample film is a diamond like carbon (DLC) film. A curve fitting technique was applied to separate C1s peak in the XPS spectra of the sample film into sp3 peak and sp2 peak, for which the percentage of sp3 is 55%. The first derivative XAES spectra also show that the percentage of sp3 is approximate to 60%by the means of linear interpolation of D. |
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| Keywords: | DLC film electrochemical deposition XPS XAES |
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