| 非平衡定态相图在含氮体系低压金刚石沉积中的应用 |
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| 引用本文： | 刘志杰,张卫,张剑云,丁士进,王鹏飞,王季陶.非平衡定态相图在含氮体系低压金刚石沉积中的应用[J].无机化学学报,1999,15(1):132-134. |
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| 作者姓名： | 刘志杰 张卫 张剑云 丁士进 王鹏飞 王季陶 |
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| 作者单位： | 复旦大学电子工程系CVD研究室,上海,200433 |
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| 基金项目： | 国家自然科学基金,“八六三”高科技基金 |
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| 摘 要： | ０前言最近几年低压金刚石制备研究中，出现了一类以含氮气相混合物为原料的制备方法，正逐渐被人们所重视：少量氮原子的存在（甚至是ｐｐｍ级）可以显著提高金刚石薄膜的淀积速率，改善薄膜质量［１，７］。本文报道根据非平衡热力学耦合理论［１０］，首次计算得到了含...
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| 关 键 词： | 碳氢氮体系 金刚石 非平衡定态 相图 |
UTILIZATION OF NON-EQUILIBRIUM STATIONARY PHASE DIAGRAMS IN C-H-N SYSTEM DIAMOND DEPOSITION |
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| LIU Zhi-Jie,ZHANG Wei,ZHANG Jian-Yun,DING Shi-Jin,WANG Peng-Fei and WANG Ji-Tao.UTILIZATION OF NON-EQUILIBRIUM STATIONARY PHASE DIAGRAMS IN C-H-N SYSTEM DIAMOND DEPOSITION[J].Chinese Journal of Inorganic Chemistry,1999,15(1):132-134. |
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| Authors: | LIU Zhi-Jie ZHANG Wei ZHANG Jian-Yun DING Shi-Jin WANG Peng-Fei and WANG Ji-Tao |
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| Institution: | Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433,Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433,Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433,Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433,Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433 and Department of Elecromic Engineering, CVD Laboratory, Fudan University, Shanghai 200433 |
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| Abstract: | Non-equilibrium diamond growth phase diagram for C-H-N system was calculated based on non-equilibrium thermodynamics and coordinates well with published experimental results. Principles of diamond growth region vary with system pressures were obtained by using calculated phase diagrams. Therefore, the phase diagrams can guide the experimental research. |
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| Keywords: | C-H-N system diamond non-equilibrium stationary phase diagram |
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