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X-ray Diffraction Analysis of the Structure In0.53Ga0.47As Films Grown on (100) and (111)A GaAs Substrates with a Metamorphic Buffer
Authors:Folomeshkin  M S  Volkovsky  Yu A  Prosekov  P A  Galiev  G B  Klimov  E A  Klochkov  A N  Pushkarev  S S  Seregin  A Yu  Pisarevsky  Yu V  Blagov  A E  Kovalchuk  M V
Institution:1.Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences, 119333, Moscow, Russia
;2.National Research Centre “Kurchatov Institute”, 123182, Moscow, Russia
;3.Mokerov Institute of Ultra High Frequency Semiconductor Electronics, Russian Academy of Sciences, 117105, Moscow, Russia
;4.St. Petersburg State University, 199034, St. Petersburg, Russia
;
Abstract:Crystallography Reports - Epitaxial In0.53Ga0.47As films, grown on GaAs substrates with the (100) and (111)А crystallographic orientations in the standard high-temperature and low-temperature...
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