|
|||||
|
|
Controlled Formation of β-Si3N4 on Native Oxidized Silicon Wafers in Ammonia Flow |
|
| Authors: | Mayboroda I O Kolobkova E M Grishchenko Yu V Chernykh I A Zanaveskin M L Chumakov N K |
| Institution: | 1.National Research Center “Kurchatov Institute”, 123182, Moscow, Russia ; |
| Abstract: | Crystallography Reports - The formation of β-Si3N4 for subsequent growth of AlGaN and GaN heterostructures of silicon wafers has been studied. It is established that the native oxide layer... |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |