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| 射频磁控溅射制备纳米TiO2薄膜的表征和亲水性能 | |
| 引用本文： | 孟凡明,任莉,王雷妮,鲁飞.射频磁控溅射制备纳米TiO2薄膜的表征和亲水性能[J].人工晶体学报,2012,41(2):329-333. |
| 作者姓名： | 孟凡明 任莉 王雷妮 鲁飞 |
| 作者单位： | 1. 安徽大学物理与材料科学学院,合肥230039;大连理工大学三束材料改性教育部重点实验室,大连116024;安徽省信息材料与器件重点实验室,合肥230039 2. 海军蚌埠士官学校机械系,蚌埠,233000 3. 安徽大学物理与材料科学学院,合肥230039;安徽省信息材料与器件重点实验室,合肥230039 |
| 基金项目： | 安徽省自然科学基金，安徽省高等学校省级自然科研基金，三束材料改性教育部重点实验室(大连理工大学)开放基金，安徽省高等学校省级教学研究项目，安徽大学211工程三期教学质量工程项目，安徽大学“质量工程”建设基金，安徽大学学术创新团队建设项目，安徽大学博士科研启动基金资助项目 |
| 摘 要： | 采用射频磁控溅射TiO2陶瓷靶的方法在硅和石英衬底上制备纳米TiO2薄膜,并经950℃退火1h.通过X射线衍射(XRD)、原子力显微镜(AFM)、紫外可见光谱(UV-Vis)和接触角仪对薄膜相结构、表面形貌、光学性能和亲水性能进行表征.结果表明,与950℃退火1h相比,未退火薄膜是无定形结构并呈现较高的光致亲水性能.退火薄膜是锐钛矿和金红石混合相,其中锐钛矿相质量分数是11.34％.未退火和950℃退火1h的薄膜样品的能隙分别是3.03 eV和3.11 eV.未退火薄膜具有较高的光致亲水性能主要归因于其较低的光学能隙.退火薄膜的热致亲水性能与其相结构、表面清洁度和粗糙度有关. |
| 关 键 词： | 射频磁控溅射 TiO2薄膜 光学性能 亲水性能 |
Characterization and Hydrophilicity of Nano-TiO2 Thin Films Prepared by Radio Frequency Magnetron Sputtering |
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| MENG Fan-ming , REN Li , WANG Lei-ni , LU Fei.Characterization and Hydrophilicity of Nano-TiO2 Thin Films Prepared by Radio Frequency Magnetron Sputtering[J].Journal of Synthetic Crystals,2012,41(2):329-333. | |
| Authors: | MENG Fan-ming REN Li WANG Lei-ni LU Fei |
| Institution: | 1,3(1.School of Physics and Materials Science,Anhui University,Hefei 230039,China;2.Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Ministry of Education,Dalian University of Technology,Dalian 116024,China;3.Anhui Key Laboratory of Information Materials and Devices,Anhui University,Hefei 230039,China;4.Machine Department,Naval Petty Official Academy of Bengbu,Bengbu 233000,China) |
| Abstract: | Nano-TiO2 thin films were deposited by RF magnetron sputtering and annealed at 950 ℃ for 1 h and characterized by X-ray diffractometer,atomic force microscope,ultraviolet-visible spectrophotometer,and water contact angle apparatus.The un-annealed film is amorphous.The annealed film is mixture of anatase and rutile,in which the mass fraction of anatase is 11.34%.The energy gap is 3.03 eV and 3.11 eV for the un-annealed and annealed films,respectively.The un-annealed film’s higher photo-induced hydrophilicity was mainly attributed to its lower energy gap.The annealed film’s thermo-induced hydrophilicity relates to its superficial cleanliness,phase structure,and surface roughness. |
| Keywords: | RF magnetron sputtering TiO2 thin films optical properties hydrophilicity |
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