| 单晶炉真空密闭性能的检验技术 |
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| 引用本文： | 施政.单晶炉真空密闭性能的检验技术[J].人工晶体学报,2005,34(1):190-192. |
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| 作者姓名： | 施政 |
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| 作者单位： | 浙江大学机械厂,杭州,310027 |
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| 摘 要： | 单晶炉炉室真空密闭性能是衡量单晶炉设备性能好坏的重要因素.本文主要介绍的是在制造单晶炉炉室和屯装配调试过程中,采用不同的工艺循序渐进地对单晶炉真空密闭性能进行检验,从而提高单晶炉设备的性能.
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| 关 键 词： | 单晶炉 真空 检漏 |
| 文章编号： | 1000-985X(2005)01-0190-03 |
Technology for Measuring Obturation of Vacuum in the Crystal Grower |
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| SHI Zheng.Technology for Measuring Obturation of Vacuum in the Crystal Grower[J].Journal of Synthetic Crystals,2005,34(1):190-192. |
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| Authors: | SHI Zheng |
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| Abstract: | The obturation of vacuum in the crystal grower is one of the most important factors to judge the equipment capability. This article mainly introduces different techniques that have been taken in the manufacturing and assembling procedures to test the obturation of vacuum in the crystal grower so as to improve the capability of the equipment. |
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| Keywords: | crystal grower vacuum leak detection |
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