氨水浓度对化学浴沉积的Zn(O,S)薄膜形貌、结构和性能的影响

采用化学浴法,以ZnSO4·7H2O和SC( NH2)2作为反应前驱物,C6H5O7 Na3·2H2O作为络合剂,NH3·H2O 作为辅助络合剂和缓冲剂制备Zn(O,S)薄膜.采用SEM、EDS、XPS、XRD和透射光谱分析方法,研究氨水浓度对化学浴法制备的Zn(O,S)薄膜形貌、成分、结构和光学性能的影响以及Zn(O,S)薄膜的形成机理.结果表明:Zn(O,S)薄膜是由ZnO和ZnS纳米颗粒混合组成的,ZnO具有纤锌矿结构,ZnS是以非晶相存在.随着反应溶液中氨水浓度的降低,薄膜中所包含的ZnO逐渐减少,ZnS逐渐增加,S/Zn原子比逐渐增加,透射率和光学带隙也逐渐增大.

Influence of Ammonia Concentration on Morphology,Structure and Properties of Zn(O,S) Films Prepared by Chemical Bath Deposition

The Zn(O,S) thin films were prepared by chemical bath deposition(CBD) using ZnSO4·7H2O and SC(NH2)2 as the precursors,C6H5O7Na3·2H2O as the complexing agent,NH3·H2O as the auxiliary complexing agent and buffer agent.The obtained thin films were characterized by scanning electron microscopy(SEM),energy dispersive spectrometer(EDS),X-ray diffraction(XRD) and UV-Vis spectrophotometry.The morphology,structure and optical properties of Zn(O,S) thin films were investigated as a function of ammonia concentration in precursors.The results reveal that Zn(O,S) films are composed of ZnO nano-particles and ZnS nano-particles.ZnO is wurtzite structure and ZnS is amorphous.As the ammonia concentration decreasing,the proportion of ZnO decreases while that of ZnS increases gradually.In the meanwhile,S/Zn atom ratios,transmission and optical band gap all increase.