椭圆偏振法研究B离子注入LiNbO_3光波导的光学特性

用椭圆偏振法研究了2.5 MeV B离子注入后的铌酸锂晶体,建立四层模型,对反射式椭圆偏振测量得出的数据进行反演拟合,得到了波导层厚度及0.3～0.8 μm波段波导层和损伤层的双折射色散曲线,发现低剂量B离子注入铌酸锂形成了折射率下降的位垒,在晶体表面下2.0 μm范围内得到了光波导结构.研究结果为以铌酸锂为基础的光波导器件研发提供了重要信息.

Study on the Optical Properties of B-implanted Lithium Niobate Waveguide with Ellipsometry

2.5 MeV B ion-implanted lithium niobate crystal was studied by ellipsometry method. Data from the measurement were inversed to fit a moderate four-layer model for the crystal. The depth of waveguide layer and the refractive index dispersion in the range of 0.3-0.8 μm were obtained. Barrier of reduced refractive index was found .Waveguide structure was get from the crystal surface to the depth of 2.0 μm in the crystal. The results provided important information for the fabrication of waveguide devices.