[100]定向织构生长金刚石薄膜的红外光学性能研究

采用微波等离子增强化学气相沉积法在(100)镜面抛光的硅片衬底上实现了金刚石薄片100]定向织构生长.并用扫描电子显微镜、拉曼散射和傅立叶红外光谱仪分析测试了不同工艺得到的金刚石薄片的表面形貌、组成结构和红外性能.结果表明:负偏压辅助定向成核和氢的等离子刻蚀不仅促进了金刚石薄膜的定向织构生长,而且还能刻蚀成核期的非金刚石成分.从而提高了金刚石薄片的红外光透过特性.

[100]-Oriented Textured Growth of the Diamond Films and Its Infrared Properties

The 100]-oriented texture growth diamond films on (100) mirror polished Si have been achieved by microwave plasma chemical vapor deposition (MPCVD) system. The film morphology, phase composition and IR properties were studied by using SEM, Raman spectroscopy and IR transmission spectroscopy. These film properties were compared with respect to the different nucleation and deposition parameters. Results show that the negative field bias between plasma and substrate assisted oriented nucleation and H+ ions etch processing not only improved diamond film 100] oriented growth but also etched off non-diamond phase which formed during the nucleation period. For this reason, the diamond film has better IR transmission after having two hours H+ ions etching during the film deposition process.