| CdZnTe(211)面纳米力学特性分析 |
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| 引用本文： | 李岩,康仁科,高航,吴东江,王景贺.CdZnTe(211)面纳米力学特性分析[J].人工晶体学报,2009,38(6). |
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| 作者姓名： | 李岩 康仁科 高航 吴东江 王景贺 |
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| 作者单位： | 1. 大连理工大学精密与特种加工教育部重点实验室,大连,116024
2. 哈尔滨工业大学精密工程研究所,哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金重点项目 |
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| 摘 要： | 采用研磨-机械抛光-化学机械抛光工艺对CdZnTe(211)面进行加工,当表面粗糙度Ra达到0.94 nm时,采用纳米压痕仪对CdZnTe(211)面进行纳米力学性能测量,试验结果表明:弹性模量和硬度随着压力的增大而减小,存在明显的尺寸效应.当针尖离开晶体表面时,黏附现象特别明显.在不同晶向上,弹性模量和硬度存在显著的各向异性.
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| 关 键 词： | 力学特性 尺寸效应 各向异性 |
Analysis on the Nanomechanical Properties of CdZnTe(211) Face |
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| LI Yan,KANG Ren-ke,GAO Hang,WU Dong-jiang,WANG Jing-he.Analysis on the Nanomechanical Properties of CdZnTe(211) Face[J].Journal of Synthetic Crystals,2009,38(6). |
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| Authors: | LI Yan KANG Ren-ke GAO Hang WU Dong-jiang WANG Jing-he |
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| Abstract: | The process of lapping, mechanical polishing and chemical mechanical polishing was used to machine the CdZnTe (211) face, when the surface roughness Ra was 0.94 nm, nano indenter was employed to measure the mechanical properties of CdZnTe (211) face, the experimental results show that the hardness and elastic modulus decrease as the indention load increasing, which is obvious the size effect. When the nanoindenter departs the crystal surface, the adherence effects are obvious. Strong anisotropy of the hardness and elastic modulus is shown on different crystallographic direction. |
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| Keywords: | CdZnTe CdZnTe mechanical properties size effect aniosotropy |
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