Ba1-xSrxTiO3薄膜的Sol-gel制备技术与微结构

研究了利用钡、锶的碳酸盐代替醋酸盐作原料,采用新的Sol-gel技术制备Ba1-xSrxTiO3(BST)铁电薄膜的技术.采用碳酸钡、碳酸锶和钛酸四丁酯作原料配制BST溶胶;通过TG/DTA分析确定了BST薄膜的制膜工艺;使用XRD、SEM、AFM技术分析了薄膜的微结构.研究结果表明,采用碳酸盐作为钡、锶的原料,用冰醋酸和乙二醇甲醚混合液作溶剂,可配制出澄清透明、能长时间放置的溶胶,用此溶胶制备出了膜厚均匀、表面光洁致密、没有裂纹的全钙钛矿相的BST薄膜;采用扫描探针显微镜的压电响应模式(PFM)观察到了BST薄膜中的具有纳米结构的a畴和c畴.

Microstructure and Fabrication of Barium Strontium Titanate (BST) Thin Films Basing a Novel Sol-gel Route

BST thin films were prepared through a novel Sol-gel process using the carbonates as the substitute of acetates.The starting materials were barium carbonate,strontium carbonate and titanium-tetrabutoxide.The crystal structure,surface morphology,grain size and the domain contrast of BST thin films have been investigated by X-ray diffraction(XRD),scanning electric microscopy(SEM),atomic force microscopy(AFM),and piezoelectric force microscopy,respectively.The results show that the fabrication of the Sol-gel derived BST thin films can be carried out well by using carbonates of Ba and Sr as the starting materials and using the mixture of acetic acid and 2-methoxyethanol as solvent.As well,the as-prepared BST thin films are compact,continuous and possess completely perovskite structure.Nano-sized a-domain and c-domain were observed by using piezoelectric force microscopy(PFM).