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Cu掺杂ZnO薄膜的制备及其光谱特性
引用本文:邱春霞,阮永丰,张灵翠,刘雅丽,王帅.Cu掺杂ZnO薄膜的制备及其光谱特性[J].人工晶体学报,2011,40(5).
作者姓名:邱春霞  阮永丰  张灵翠  刘雅丽  王帅
作者单位:天津大学理学院,天津,300072
基金项目:天津市自然科学基金(07JCZDJC00600、07JCYBJC06000)
摘    要:采用溶胶-凝胶法在铟锡氧化物(ITO)导电玻璃基底上制备了不同掺杂浓度的Cu∶ ZnO薄膜.采用X射线衍射仪和扫描电子显微镜分析了薄膜样品的晶相结构和形貌,用荧光光谱仪测量了薄膜样品的光致发光谱.结果表明:Cu∶ ZnO薄膜均为六角纤锌矿结构,呈c轴择优取向,且因压应力的存在使其晶格常数略小于未掺杂薄膜样品的晶格常数;低温和高温退火处理的薄膜样品的光致发光谱(PL)中分别观察到414 nm、438 nm的蓝光双发射峰和510 nm左右的绿光发射峰.蓝光发射峰与样品中的Vzn和Zni有关,而绿光发射峰与样品中的Vo -Zni有关.

关 键 词:溶胶-凝胶法  Zn1-x  Cux  O薄膜  光致发光谱  缺陷能级

Preparation and Spectral Characteristics of Cu Doped ZnO Thin Films
QIU Chun-xia , RUAN Yong-feng , ZHANG Ling-cui , LIU Ya-li , WANG Shuai.Preparation and Spectral Characteristics of Cu Doped ZnO Thin Films[J].Journal of Synthetic Crystals,2011,40(5).
Authors:QIU Chun-xia  RUAN Yong-feng  ZHANG Ling-cui  LIU Ya-li  WANG Shuai
Institution:QIU Chun-xia,RUAN Yong-feng,ZHANG Ling-cui,LIU Ya-li,WANG Shuai(School of Science of Tianjin University,Tianjin 300072,China)
Abstract:Cu doped ZnO thin films with different doping concentrations were prepared on indium-doped tin oxide(ITO) conducting glass substrates by sol-gel technique.The crystalline phase structure and surface morphology of the films were analyzed by X-ray diffraction and scanning electron microscope.The photoluminescence spectra of samples were measured by fluorescence spectrophotometer.The results show that these films have a compact hexagonal wurtzite type structure and high c-axis preferred orientation.Lattice con...
Keywords:sol-gel method  Zn1-xCuxO thin films  photoluminescence spectrum  defect levels  
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