| AIT玻璃衬底非晶硅薄膜的固相晶化研究 |
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| 引用本文： | 郑文,陈永生,卢景霄.AIT玻璃衬底非晶硅薄膜的固相晶化研究[J].人工晶体学报,2011,40(6). |
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| 作者姓名： | 郑文 陈永生 卢景霄 |
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| 作者单位： | 1. 滨州学院物理与电子科学系,滨州,256600
2. 郑州大学材料物理教育部重点实验室,郑州,450052 |
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| 基金项目： | 滨州学院青年人才创新工程项目(BzxYQN2G200828) |
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| 摘 要： | 本实验在铝诱导织构的基础上,对以AIT浮法玻璃为衬底沉积非晶硅薄膜固相晶化进行了初步研究.采用拉曼散射、X射线衍射等手段对生成多晶硅薄膜的结构和光学性能进行了表征和分析.研究结果表明:热处理10h,薄膜的晶化率达到80％以上,同时具有良好的(111)择优取向；同平板玻璃衬底对比,AIT玻璃上制备的多晶硅薄膜具有良好的陷光作用.
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| 关 键 词： | 铝诱导织构 固相晶化 多晶硅薄膜 陷光作用 |
Solid Phase Crystallization of Amorphous Silicon Prepared on AIT Glass |
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| ZHENG Wen
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CHEN Yong-sheng
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LU Jing-xiao.Solid Phase Crystallization of Amorphous Silicon Prepared on AIT Glass[J].Journal of Synthetic Crystals,2011,40(6). |
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| Authors: | ZHENG Wen CHEN Yong-sheng LU Jing-xiao |
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| Institution: | ZHENG Wen1,CHEN Yong-sheng2,LU Jing-xiao2(1.Department of Physics and Electronics,Binzhou College,Binzhou 256600,China,2.Key Laboratory of Material Physics of Ministry of Education,Zhengzhou 450052,China) |
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| Abstract: | Solid phase crystallization(SPC) of amorphous Silicon(a-Si) films prepared on aluminum-induced textured(AIT) glass was studied.The structure and optical properties of films were studied by virtue of Raman scattering spectra and X-ray diffraction.The results show that the crystalline volume fraction on AIT glass has reached above 80% by rapid-thermal process after 10 h,and it has a better light trapping effect compared with the films prepared on planar glass. |
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| Keywords: | aluminum induced texture solid phase crystallization multicrystalline silicon light trapping effect |
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