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基于微机械加工工艺的声子晶体器件
引用本文:郑忱煜,徐德辉,熊斌.基于微机械加工工艺的声子晶体器件[J].人工晶体学报,2019,48(8):1418-1423.
作者姓名:郑忱煜  徐德辉  熊斌
作者单位:中国科学院上海微系统与信息技术研究所微系统技术重点实验室,上海 200050;中国科学院大学,北京 100049;中国科学院上海微系统与信息技术研究所微系统技术重点实验室,上海,200050
基金项目:国家自然科学基金(51675516)
摘    要:声子晶体是一种周期复合人工超材料。声子晶体具有独有的声学特性-声学禁带,使其在声波控制和传输领域具有极强的应用潜力。利用微机械加工工艺制备的硅基声子晶体器件,可在微机电系统中实现高频弹性波的定向传输和控制,以及对弹性波能量的局域放大。设计了两种基于MEMS工艺的器件,分别用于实现功分器和谐振器的功能。内容覆盖了硅基声子晶体器件的背景、原理、设计、制造和表征等方面。

关 键 词:声子晶体  微机电系统  禁带

Phononic Crystal Devices Based on Micromachining Technology
ZHENG Chen-yu,XU De-hui,XIONG Bin.Phononic Crystal Devices Based on Micromachining Technology[J].Journal of Synthetic Crystals,2019,48(8):1418-1423.
Authors:ZHENG Chen-yu  XU De-hui  XIONG Bin
Institution:(Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)
Abstract:The phononic crystal is a kind of periodic artificial metamaterials. Phononic crystal has a unique acoustic characteristic-acoustic bandgap, which makes it has a great application potential in the field of sound wave control and transmission. The silicon microphononic crystal device prepared by micromachining technology can realize the directional transmission and control of high frequency elastic wave and local amplification of elastic wave energy in MEMS. Two kinds of devices based on micromachining technology were designed to realize the functions of power divider and resonator respectively. It covers the background, principle, design, manufacture and characterization of silicon microphononic crystal devices.
Keywords:phononic crystal  micro electromechanical system(MEMS)  bandgap
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