Electron transport through high-κ dielectric barriers: A non-equilibrium Green’s function (NEGF) study |
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Authors: | D Munteanu JL Autran M Moreau M Houssa |
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Institution: | 1. IM2NP, UMR CNRS 6242, 49 Rue Joliot-Curie, BP 146, 13384 Marseille cedex 13, France;2. Institut Universitaire de France (IUF), 103 Boulevard Saint-Michel, F-75005, Paris, France;3. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium |
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Abstract: | We present a simulation study of the coherent transport of electrons through high permittivity (high-κ) dielectric barriers using the non-equilibrium Green’s function (NEGF) formalism. Calculation and useful formula are established for a one-dimensional grid using a finite-difference scheme and an effective-mass depending on the position along the grid. A numerical simulation code is used to investigate the tunneling properties and the transmission coefficient of different metal–insulator–metal structures with stacked dielectrics and to compare single- or two-layer high-κ dielectric stacks in terms of tunneling transmission coefficient and local density-of-states. We particularly highlight the influence of wave-function reflections against barrier discontinuity on the transmission coefficient, especially in two-layer high-κ dielectric stacks. |
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