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High resolution patterning of silica aerogels |
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| Authors: | MF Bertino JF Hund G Zhang N Leventis J Terry |
| Institution: | a Department of Physics, University of Missouri-Rolla, Rolla, MO 65409, USA b Department of Chemistry, University of Missouri-Rolla, Rolla, MO 65409, USA c NASA Glenn Research Center, Materials Division/Polymers Branch, 21000 Brookpark Road, Cleveland, OH 44135, USA d Department of Nuclear Engineering, University of Missouri-Rolla, Rolla, MO 65409, USA e Department of Physics, University of Notre Dame, Notre Dame, IN 46556, USA f Biological, Chemical, and Physical Sciences, Illinois Institute of Technology, Chicago, IL 60616, USA |
| Abstract: | Three-dimensional metallic structures are fabricated with high spatial resolution in silica aerogels. In our method, silica hydrogels are prepared with a standard base-catalyzed route, and exchanged with an aqueous solution typically containing Ag+ ions (1 M) and 2-propanol (0.2 M). The metal ions are reduced photolytically with a table-top ultraviolet lamp, or radiolytically, with a focused X-ray beam. We fabricated dots and lines as small as 30 × 70 μm, protruding for several mm into the bulk of the materials. The hydrogels are eventually supercritically dried to yield aerogels, without any measurable change in the shape and spatial resolution of the lithographed structures. Transmission electron microscopy shows that illuminated regions are composed by Ag clusters with a size of several μm, separated by thin layers of silica. |
| Keywords: | A120 O160 R100 |
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