复杂微力－电系统的细微尺度力学

现代高新技术的崛起，提出了大量新的经典力学所不能完全包容的力学问题。这将是现代应用力学发展的巨大动力。微电子技术中微电子材料、器件、系统和微电子－机械系统（ｍｉｃｒｏｅｌｅｃｔｒｏ－ｍｅｃｈａｎｉｃａｌｓｙｓｔｅｍ，ＭＥＭＳ）所组成的复杂微力－电系统，是跨世纪发展的新科技方向，本文简要介绍了复杂微力，电系统的工业技术背景和发展；综述了这一领域存在的力学问题，主要讨论细微尺度下的结构力学与破坏力学。并评介与展望了这一新的力学领域的研究状况和发展趋势。

MESO-AND MICRO-SCOPIC MECHANICS FOR COMPLEX MICRO MECHANICAL-ELECTRICAL SYSTEMS

With the development of advanced technology,a lot of problems not covered completely by the classical mechanics have to be dealt with Which will be a great driving force for future development of applied mechanics,One of these important problems is the complex micro mechanical-electrical systems in cluding microelectric materials,components and systems and micro electrical- mechanical systems in microelectric technology,In the present paper,the in- dustry background and development of complex micro mechanical-electrical systems are introduced briefly,Some problems of mechanics in this field are summarised,Attention is mainly focused on the meso-and micro-scopic structural mechanics and failure mechanics,The state-of-the-art and future trends of development of this new mechanics field are reviewed and discussed