Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part II: Experimental Validation for Magnifications from 200 to 10,000 |
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Authors: | M A Sutton N Li D Garcia N Cornille J J Orteu S R McNeill H W Schreier X Li A P Reynolds |
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Institution: | (1) Department of Mechanical Engineering, University of South Carolina, Columbia, SC 29208, USA;(2) 108 Ennismore Common Lane, Columbia, SC 29229, USA;(3) Correlated Solutions, Inc, 952 Sunset Boulevard, West Columbia, SC 29252, USA;(4) Ecole des Mines d’Albi, Albi, France |
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Abstract: | A combination of drift distortion removal and spatial distortion removal are performed to correct Scanning Electron Microscope
(SEM) images at both ×200 and ×10,000 magnification. Using multiple, time-spaced images and in-plane rigid body motions to
extract the relative displacement field throughout the imaging process, results from numerical simulations clearly demonstrate
that the correction procedures successfully remove both drift and spatial distortions with errors on the order of ±0.02 pixels.
A series of 2D translation and tensile loading experiments are performed in an SEM for magnifications at ×200 and ×10,000,
where both the drift and spatial distortion removal methods described above are applied to correct the digital images and
improve the accuracy of measurements obtained using 2D-DIC. Results from translation and loading experiments indicate that
(a) the fully corrected displacement components have nearly random variability with standard deviation of 0.02 pixels (≈25 nm
at ×200 and ≈0.5 nm at ×10,000) in each displacement component and (b) the measured strain fields are unbiased and in excellent
agreement with expected results, with a spatial resolution of 43 pixels (≈54 μm at ×200 and ≈1.1 μm at ×10,000) and a standard
deviation on the order of 6 × 10−5 for each component.
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Keywords: | Scanning electron microscopy High and low magnification Uniaxial tension experiment Drift and distortion correction 2D digital image correlation |
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