SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency |
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Authors: | E?A?Moore D?Langley M?E?Jussaume L?A?Rederus C?A?Lundell JrEmail author" target="_blank">R?A?CoutuJrEmail author P?J?Collins L?A?Starman |
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Institution: | (1) Air Force Institute of Technology, 2950 Hobson Way, Wright-Patterson Air Force Base, Wright-Patterson AFB, OH 45433, USA; |
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Abstract: | A microelectromechanical systems (MEMS) cantilever array was monolithically fabricated in the gap region of a split ring resonator
(SRR) to enable electrostatic tuning of the resonant frequency. The design consisted of two concentric SRRs each with a set
of cantilevers extending across the split region. The cantilever array consisted of five beams that varied in length from
300 to 400 μm, with each beam adding about 2 pF to the capacitance as it actuated. The entire structure was fabricated monolithically
to reduce its size and minimize losses from externally wire bonded components. The beams actuate one at a time, longest to
shortest with an applied voltage ranging from 30–60 V. The MEMS embedded SRRs displayed dual resonant frequencies at 7.3 and
14.2 GHz or 8.4 and 13.5 GHz depending on the design details. As the beams on the inner SRR actuated the 14.2 GHz resonance
displayed tuning, while the cantilevers on the outer SRR tuned the 8.4 GHz resonance. The 14.2 GHz resonant frequency shifts
1.6 GHz to 12.6 GHz as all the cantilevers pulled-in. Only the first two beams on the outer cantilever array pulled-in, tuning
the resonant frequency 0.4 GHz from 8.4 to 8.0 GHz. |
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